摘要
为提高芯片封装的加工精度和效率,提出了一种由音圈电机驱动的二自由度高速精度定位平台,并基于音圈电机的性质和平台结构的动态分析,建立了平台控制系统数学模型．为降低高速频繁起停过程中定位系统产生的残余振动,以最小的超调量快速达到稳态响应允许波动范围的最小节拍响应控制策略来进行参数优化．通过进行系统理论仿真和实验验证,结果表明,所设计的控制系统,稳定时间小于20 ms,运动加速度可达8g,定位精度小于2μm,重复定位精度为1μm左右,该控制系统动态品质优良,鲁棒性好．
To improve the precision and efficiency of the integrated circuit（IC）package, a 2-DOF high speed and high precision XY positioning table driven by voice coil actuator is presented, Based on the dynamic analysis of the table structure and the characteristic of the actuator, mathematical model of the control system is given. Considering the remnant librations during the high frequent starts and stops, the minimum deadbeat response controlling algorithm is introduced to the control system to reduce the mechanical resonance at high acceleration and deceleration rates. The results of the simulation and experiment show that the positioning system using above control algorithm has a setting time of lower than 20 ms, an acceleration of 8g, a positioning accuracy of lower than 2 μm, and a positioning accuracy of repeatability of about 1 μm. It indicated the system is robust and has good dynamic characteristics.
出处
《天津大学学报》
EI
CAS
CSCD
北大核心
2006年第9期1060-1065,共6页
Journal of Tianjin University(Science and Technology)
基金
国家高技术研究发展计划资助项目(2003AA404060).
关键词
芯片
引线键合
音圈电机
最小节拍响应
integrated circuit
wire bonding
voice coll actuator
minimum deadbeat response
