摘要
文章对集成电路工艺计算机辅助设计系统(TCAD虚拟FAB系统)做了简要介绍,指出了TCAD在新工艺开发中的地位,提出了利用TCAD进行新工艺开发的思想。以synopsys公司的TWB虚拟FAB系统为例,对TCAD用于新工艺的开发作了探讨,并给出了以此为平台进行700V高压BCD工艺设计的实例。
The article gives a brief introduction of the TCAD Virtual FAB infrastructure system. In the article the author points out the position of TCAD in the IC process development and puts forward the method that using TCAD in IC new process development. Then take TWB software package of Synopsys corporation as an example, he discusses how TCAD can be used in the IC new process development. A 700V BCD process design was also given as an example to justify the method that the author has proposed.
出处
《微计算机信息》
北大核心
2006年第10S期131-133,169,共4页
Control & Automation
基金
上海市教委的资助(编号20443)
