摘要
介绍了基于压电陶瓷驱动器(PZT)驱动的二维微动工作台。该微动台采用双柔性平行四连杆结构,运用参数化的分析方法求得铰链各尺寸对微动台固有频率、应力以及刚度的影响,将理论分析、有限元计算和试验测试的结果相结合,提出了一种微动台的设计方法。
A novel 2-DOF nanopositioning stage drived by PZT is discribed in this paper. It is based on the dualflexure-hinge structure . The numerical analysis on the dimensions＇ influence on the modal frequency,stress and the stiffness of the stage is carried out by using the parametric analysis. A new design method is declared in the paper in terms of the consistency of the theory, numerical and experimental analysis .
出处
《压电与声光》
CSCD
北大核心
2006年第5期624-626,共3页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(50135040
69774020)
