摘要
在研制成功GeSi全内反射(TIR)型电光开关的基础上,对这种电光开关与GeSi/Si SLS红外传感器的集成可行性进行了深入探索.
The GeSi TIR electrooptical switch has been successfully made, and the inte-gration of electrooptical switch and GeSi/Si SLS infrared sensor have been studied inthis paper. Those studies show that this OEIC is possible.
出处
《传感技术学报》
CAS
CSCD
1996年第4期35-38,共4页
Chinese Journal of Sensors and Actuators
