摘要
Ｅｅ－ＢＥＳ－４０光栅扫描电子束曝光机全部实现自动控制，为用户操作带来极大方便。本文简要论述该机的构成及调试中遇到的问题。重点论述真空自动化，送片机构的自动化，以及电子光柱调整的自动化。
Full-automatic control is realized in Ee-BES-40A raster scanning electron beam exposure machine. It is convenient for user to operate the machine. In the paper,the machine constitution and some problems encountered during the adjustment is discussed.The automation of vacuum, substrate load system and adjustment of electron baem. column are discussed in detail here.
出处
《微细加工技术》
1996年第3期14-19,共6页
Microfabrication Technology
关键词
电子束曝光机
光栅扫描
电子器件
raster scanning
electron beam exposure machine
automation
