摘要
为了避免微加速度计在工作过程中因为共振导致结构损坏,需要在结构中合理设计阻尼.设计了一个复合量程压阻式微加速度计,为了使结构中各个传感器具有较好的阻尼参数,通过静电键合在硅结构层下制作一玻璃层.根据Reynolds方程,可知当硅-玻璃静电键合间距d=2.25μm时,复合量程微加速度计中各个传感器可得到较好的阻尼比.
To reduce the probable damage caused by resonance in micro accelerometers, an adaptative method is of advantage in damping design. A multi-ranged piezoresistive micro accelerometer is designed, to achieve a reasonable damping ratio of this sensor so as to obtain a preferable amplitude-frequency characteristic and phase-frequency characteristic, an anodic bonding technology is adopted to fabricate a glass-cap below of the mass. The distance between the bottom of mass and the top of the glass-cap is calculated as 5.22 μm, according to the Reynolds function.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第05B期2186-2189,共4页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金资助(50535030
50405025
50375050)
霍英东基金资助(01052)
关键词
复合量程微加速度计
压阻式
二阶系统
阻尼
multi-ranged micro accelerometer
piezoresistive
second-order system
damping
