摘要
介绍了一种新型的电容式微加速度传感器的信号处理电路,可以用来检测电容式微加速度传感器敏感的加速度.该电路采用电荷敏感原理,能较好地消除寄生电容的影响.同时电路工作于闭环模式,具有稳定的工作特性.实验结果表明该电路不仅能很好的消除外部环境噪声的干扰,同时提高了传感器的整体性能.
The paper introduces a new kind of signal process circuit of Micro-accelerometer, it used to detect the acceleration of Micro-accelerometer. The circuit uses the theory of charge sensitivity, it can eliminate the interference parasitical capacitance. And the circuit works in the model of close-loop which ensure its steady performance. The result of the experiment indicates that the circuit no only eliminate the disturb of the circumstance, but also improve the performance of the sensor.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第05B期2190-2192,2196,共4页
Chinese Journal of Sensors and Actuators
