摘要
根据鱼类侧线听觉仿生学原理,设计出硅微仿生矢量水声传感器结构.该传感器结构包括高精度压阻式硅微换能单元结构和空芯光子晶体光纤柱体.讨论了水声传感器结构的仿生学原理和声学原理.用有限元软件Ansys分析传感器的应力分布,讨论了传感器的加工工艺,并采用气流静态加载法测试出传感器的矢量指向性图,测试结果表明,仿生水声传感微结构具有“8字型”矢量指向性.
According to the auditory principle of fish＇s stereocilium, a bionic hydrophone based on silicon is designed. It consists of a high precision piezoresistive unit and an air-core photonic crystal fiber pole. The principle of bionics and hydroacoustics about vector hydrophone has been discussed, The distribution of stress has been performed with FEM （Finite Element Method） simulator, and the fabrication has been researched. The vector direction has been measured under air-flow static load. The result shows that the structure has＇8 shape＇ vector direction.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第05B期2300-2303,共4页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金项目资助(50405025
50375050)
山西省自然基金资助
博士点基金资助
