摘要
采用加权残余法建立了静电驱动梁单元的节点法模型,在HSPICE中构建了相应的等效电路模型。以静电驱动的双端固支梁为例用ANSYS模拟软件对模型进行了验证,结果表明模型具有较高的精度。
A nodal analysis model of electrically actuated microbeams was developed based on a weighted residual method. The equivalent circuit was then built by HSPICE. It proved precise in comparison with ANSYS software with example of the electrically actuated fixed-fixed microbeam.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第05A期1364-1367,共4页
Chinese Journal of Sensors and Actuators
关键词
静电驱动梁
节点法
加权残余法
等效电路
MEMS
electrically actuated microbeam
nodal analysis method
weighted residual method
equivalent circuit
MEMS
