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PET基纳米ZnO膜的溅射沉积及AFM表征 被引量:3

Sputtering ZnO nano films on PET substrate and the surface characterization by AFM
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摘要 在纺织材料表面进行ZnO镀层处理,能赋予聚合物纤维表面以特殊的光电功能.利用磁控溅射法在PET非织造布表面制备出颗粒均匀、细致、稳定的纳米ZnO薄膜.利用原子力显微镜(AFM)对不同参数下制备的ZnO薄膜表面形貌进行表征,分析了不同溅射加工条件对ZnO薄膜表面形态的影响. The polymer fibers have photoelectricity particularly by plating ZnO films on the surface ot textile materials. Nano- ZnO thin films were prepared by magnetron sputtering on the Polyethylene Terephthalate (PET) nonwoven fabric substrates. The nano- ZnO grains were uniform and stably prepared by magnetron sputtering. The surface topography of the ZnO thin film was observed by the Atom Force Microscopy (AFM) under the different technical parameters, analyzing the influence of the surface shape of ZnO which was prepared under different sputter parameters. The paper searches for a new method of the surface functional finishing of the textile materials.
出处 《安徽工程科技学院学报(自然科学版)》 2006年第3期42-45,共4页 Journal of Anhui University of Technology and Science
基金 教育部科学技术研究重点资助项目(106089)
关键词 纳米ZNO 磁控溅射 原子力显微镜 nano -ZnO magnetron sputtering Atom Force Microscope
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