摘要
用离子束溅射法制备了具有反常光吸收特性的纳米颗粒CU／SiO2复合薄膜。获得了在离子来参数一定时，基片温度、膜料的沉积时间和镀膜后的保温时间等工艺参数对这种薄膜结构和光学特性的影响规律，并对纳米颗粒Cu／SiO2复合薄膜的反常光吸收特性作了计算和解释。
Nanometer particle Cu/SiO2 thin solid films were prepared by ion beam deposition which possess anomalous optical absorptlon properity. The regularity of the influence of parameters such as the temperature of substrate,the deposition time and the annealing time after deposition on the structure and optical property when the parameters of ion beam are unchangable has been obtained. The anomalous absorption phenomenon of nanometer particle Cu/SO2 film has been explained and calculated.
出处
《真空科学与技术》
CSCD
1996年第4期270-276,共7页
Vacuum Science and Technology
