摘要
介绍了一种基于LabV IEW的光学镀膜宽光谱综合监控系统。阐述了光学镀膜宽光谱监控的原理和高级图像编程语言(LabV IEW)在此系统中的应用;监控系统可以用于光学薄膜在线实时监控和光学薄膜的光谱特性检测。
The study on optical film thickness monitoring system by wideband spectrum based on LabVIEW was described in this paper. The application principle on optical film thickness monitoring system by wideband spectrum and the appliance of the high-level image programme language （LabVIEW）were described too. This monitoring system can also be applied in online monitoring and spectrum characteristic study of optical film.
出处
《光学仪器》
2006年第5期66-70,共5页
Optical Instruments
关键词
光学薄膜
宽光谱
膜厚监控
光谱特性
LABVIEW
optical film
wideband spectrum
film thickness monitoring
spectrum characteristic
LabVIEW
