摘要
针对目前光电自准直仪难以做到既有高分辨力同时又有大的测量范围的不足,提出一种成像式光栅自准直测角方法。该方法将成像式光栅方法、自准直测角技术相结合,利用标尺光栅像和指示光栅形成的光栅副反映被测物体的角度变化。试验结果表明,该系统接收到的光栅信号稳定,满足光栅计数的要求,成像式光栅自准直测角方法原理可行。该方法避免了光栅副间隙带来的误差,具有大量程及较高的分辨力。
In order to make up for the deficiency that photoelectric autocollimator does not nave toga resolution and large measuring range at present, an auto-collimation angular measurement method based on imaging grating is presented. Combining imaging grating method with auto-collimation angular measurement technique, the method carries out measurement of small angles by means of grating pair between main grating image and indicating grating. The experimental result shows that the grating signals received are stable and can realize grating counts. The method avoids the error caused by the clearance of grating pair and has high resolution and large measuring range.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2006年第11期49-51,共3页
Opto-Electronic Engineering
基金
国家863高技术项目资助
关键词
成像光栅
自准直测角
高分辨力
大测量范围
角度测量
Imaging grating
Auto-collimation angular measurement
High resolution
Large measuring range
Angle measurement
