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LTCC基板用CaBSi玻璃的制备与性能研究 被引量:6

Research on Preparation and Properties of CaBSi Glass for LTCC Substrate
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摘要 采用sol-gel法制备了CaO-B2O3-SiO2玻璃粉体材料。用TGA-DSC、XRD、SEM对样品进行了表征。分析表明,当钙含量不变时,随着硼含量的增加熔点降低,但是超过一定值后,其性能恶化。当硼含量不变时,随着钙含量的增加玻璃料的析晶趋势增强,熔点升高,热膨胀系数的测试值也接近理论计算值。将CaBSi—3与堇青石和莫来石陶瓷粉末低温共烧后其主要性能指标为:α≈3.5×10–6℃–1,εr<4.9,tanδ<14×10–4,ρ>1013?·cm,σ>160MPa。 CaO-B2O3-SiO2 glass powder was prepared by sol-gel process, TGA-DSC, XRD and SEM techniques were employed during the study. The results show that melt point had decreased with the increasing of boron when the content of calcium fixed, but its properties deteriorated when the boron exceeded; the trend of crystallization was enhanced with the increased of calcium, but melt point also increased; the test values of the thermal expansion coefficient were also close to the theory value. The main properties of the low temperature co-fired substrate material with CaBSi-3, cordierite and mullite are as following: α≈3.5×10^-6℃^-1,εr〈4.9,tan δ〈14×10^-4,p〉10^13Ω·cm,σ〉160MPa.
出处 《电子元件与材料》 CAS CSCD 北大核心 2006年第12期66-69,共4页 Electronic Components And Materials
关键词 无机非金属材料 CaO-B2O3-SiO2玻璃 低温共烧 SOL-GEL法 inorganic non-metallic materials CaO-B2O3-SiO2 glass low temperature co-fired sol-gel process
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