摘要
光外差激光干涉测量技术具有非接触、超高灵敏度的优点,用于微小振动的测量有独特的优势。采用外差激光干涉技术,结合正交正弦逼近法,在国家高频基准振动台上实现了纳米级的振动位移和相位测量。
Based on the non-contact and super-sensitivity of the heterodyne interfere teehnique, and its particular advantage at minuteness vibration test, we set up a heterodyne interferometer and use the sine-approximate method, and got the nanometer level displaeemer, t and phase shift measurement of high-frequency vibration at the national standard device.
出处
《科技导报》
CAS
CSCD
2006年第11期13-14,共2页
Science & Technology Review
关键词
外差干涉仪
正弦逼近法
振动测量
相位移
heterodyne interferometer
sine-approximate method
vibration measuremenl
phase shift
