摘要
根据热力学理论推导出(Hg,Cd)Te液相外延生长过程中有效分凝系数的表达式并与实验结果进行比较,由此分析了Hg压、溶液组成、降温速度及过冷度等对(Hg,Cd)Te液相外延薄膜纵向组分分布的影响.
Abstract The effective segregation coefficient of (Hg,Cd)Te during the liquid phase epitaxy(LPE) period is derived and compared with the experimental data. Based on this, the influences of Hg partial pressure, liquid compositions, supercooling and cooling rate on the composition-in-depth profile of (Hg, Cd)Te liquide phase epitaxial films are analyzed.