摘要
为了推动碳化硅(S iC)光学材料镜面加工研究的发展,介绍了不同种类S iC及其针对性应用,综述了可用于S iC的精加工技术及获得高质量镜片表面的方法,并指出S iC光学材料镜面加工的发展方向.
For the development of silicon carbide optical materials in obtaining of high quality optical surface, three kinds of SiC usually used in optic and their utilities preferred are introduced. The precision machining for SiC as well as methods to obtain highly smooth surface are summarized and the development of SiC optical machining is reviewed.
出处
《材料科学与工艺》
EI
CAS
CSCD
北大核心
2006年第6期622-625,共4页
Materials Science and Technology
关键词
SIC
光学材料
表面加工
SiC
optical material
surface machining
