期刊文献+

薄层软刻蚀法制备PMMA微图案结构 被引量:3

MICROPATTERNS OF PMMA FABRICATED BY THIN LAYER SOFT LITHOGRAPHY
下载PDF
导出
摘要 对现有的软刻蚀方法提出了改进,让其与压印技术及毛细力刻蚀技术相结合形成一种薄层软刻蚀技术,并以这种技术制备出PMMA薄膜微图案化结构.在30 mm/h的拉膜速度以及弹性印章表面图形深度确定不变的情况下,PMMA流体能够完全填充到弹性印章的微通道中,SEM和光学显微镜照片证明得到的PMMA微图案是相互分离的.因此,薄层软刻蚀技术可以克服普通微模塑方法制备分离图形困难和纳米压印技术中需要使用巨大机械压力的缺点. A new lithography technology called thin layer soft lithography (TLSL) was proposed for the improvements of soft lithography. In this article, PMMA uniform thin layer was first deposited on glass substrate using dip-coating technology with 30 mm/h immersion and withdrawn velocity. When a micropatterned PDMS stamp is placed on the PMMA thin layer surface with 20 g contact load and heated above the PMMA glass-transition temperature ( Tg), PMMA melt will fill into the cavity between the stamp and the PMMA thin layer within 60 rain time, thereby generating a negative replica of the stamp. SEM and optical micregraph images show that the PMMA micropatterns are separated from each other, which is very hard to obtain in normal micromolding or nanoimprint lithography. Hence this technology is the combination of the advantages of room temperature nanoimprint lithography with the capillary force lithography. It overcomes the use of extremely high pressure in room temperature nanoimprint lithography and the lack of the drive force in capillary force lithography.
出处 《高分子学报》 SCIE CAS CSCD 北大核心 2007年第1期42-46,共5页 Acta Polymerica Sinica
基金 国家自然科学基金(基金号20374049)资助项目 高等学校博士学科点专项科研基金(基金号20040358018) 华东交通大学基金(基金号304139)资助项目
关键词 薄层软刻蚀 聚甲基丙烯酸甲酯 微结构 Thin layer soft lithography, Polymethyl methacrylate (PMMA), Micrepattern
  • 相关文献

参考文献12

二级参考文献64

  • 1蔡林涛,姚士冰,周绍民.聚苯胺的成核及生长机理[J].化学学报,1995,53(12):1150-1156. 被引量:19
  • 2[1]Whitesides, G. M.; Love, J. C. Scientific American, 2001, 9:39
  • 3[2]Jackman, R. J.; Whitesides, G. M. Chemtech, 1999, 5:18
  • 4[4]Pan, L. J.; He, P. S. Chemistry, 2000, 6;5(12): 12[潘力佳,何平笙.化学通报(HuaxueTongbao), 2000, 63 (12): 12]
  • 5[5]Zhao, X. M.; Xia, Y. N.; Whitesides, G. M. J. Mater.Chem., 1997, 7(7): 1069.
  • 6[6]Xia, Y. N.; Rogers, J. A.; Paul, K. E.; Whitesides, G. M.Chem. Rev.,1999, 99(7): 1823
  • 7[2]Todorovic M, Schultz S, Wong J, Scherer A. Appl Phys Lett, 1999,74(17):2516 ~ 2518
  • 8[3]Pankhurst Q A, Pollard R J. J Phy Condens Matter, 1993,5: 8487 ~ 8489
  • 9[4]Roger J, Pons J N, Massart R, Halbreich A, Bacri J C. Euro Phys J Appl Phys, 1999,5(3):321 ~ 325
  • 10[5]Falicov L M, Pierce D T, Bader S D, Gronsky R, Hathaway K B, Hopster H J, Lambeth D N, Parkin S S P, Prinz G, Salamon M, Schuller I K,Victora R H.J Mater Res, 1990,5:1299 ~ 1304

共引文献14

同被引文献18

引证文献3

二级引证文献2

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部