摘要
介绍了国内外几种技术比较成熟的可变形反射镜的工作原理,分析了它们的优缺点。针对作者设计、研制的两种可变形反射镜及相关成果进行了评述。利用自主研发的测试系统,对可变形反射镜的特性进行了测试,并且预测了可变形反射镜的发展方向。
Several deformable mirrors（DMs） have been summarized, whose fabrication technology is relatively mature, then its advantage and disadvantage have been analyzed. Two types of DMs fabricated by the author have been stated. A new system has been designed to test the characteristics of the DMs, and the development direction of DMs in the future has been forecasted.
出处
《半导体光电》
EI
CAS
CSCD
北大核心
2006年第6期659-663,736,共6页
Semiconductor Optoelectronics
基金
航天支撑基金项目(0413JW05)
关键词
自适应光学
可变形反射镜
波前校正
特性
adaptive optics
deformable mirror
wavefront correction
characterization testing
