摘要
讨论了一种通过在铌酸锂衬底上制备非对称Mach-Zehnder干涉仪结构的光波导,得到具有自然偏置点的电场传感器。讨论了该器件主要参数的理论设计方案和工艺设计方案,并对试验结果进行了分析。
The electric field sensor with bias point has been discussed, which is made of a unsymmetrical Mach-Zehnder interferometer optical waveguide on LiNbO3 crystal. The design method of main parameter and process technologies for these devices have been presented as well as the analysis of experimental result.
出处
《半导体光电》
CAS
CSCD
北大核心
2006年第6期679-682,共4页
Semiconductor Optoelectronics
关键词
偏置点
集成光学
电场传感器
强度调制器
pre-bias point
integrated optics
electric field sensor
intensity modulator
