摘要
三氟乙酸盐-金属有机沉积技术(TFA-MOD)是制备钇钡铜氧涂层导体的有发展前景的方法之一。采用TFA-MOD技术在铝酸镧单晶基片上制备出YBa2Cu3O7-x涂层导体,并对不同烧结温度下制备的薄膜作了分析比较,找到了较为合适的烧结温度。用X射线衍射进行了物相的定性分析,由YBCO薄膜的(103)扫描图谱分析了薄膜的外延生长,用原子力显微镜观察了薄膜表面形貌。结果表明制备出的YBCO薄膜表面均匀致密、无明显裂纹、有较强的(00l)衍射峰。
The metal organic deposition (MOD) of YBa2Cu3OT7-x( YBCO ) using metal trifluoroacetate (TFA) precursor is considered to be a strong candidate as a low-cost fabrication process in coated conductors. YBCO was fabricated on LAO (001) substrate by TFA-MOD, and to find the best sintering temperature, YBCO films fabricated at different sintering temperatures were compared. Crystal phase in the film was detected by X-ray diffraction (XRD). The microstructure of the YBCO was characterized by AFM. The results show that YBCO films on LAO substrate with the c-axis grain orientation, dense surface and no crack are obtained.
出处
《稀有金属》
EI
CAS
CSCD
北大核心
2006年第6期751-756,共6页
Chinese Journal of Rare Metals
基金
"863"计划项目(2002SAA306211
2004AA306130)资助项目