摘要
讨论了微型半球陀螺仪特有的一些误差源,主要有感测电路上的量测误差、电极与薄壳间电容的非线性效应误差、温度变化所引发的热漂移、线加速度所引发的误差以及非对称结构和非对称阻尼误差等。对上述误差源的认识是微结构制造和电路设计的基础。
Some error sources peculiar to miniature hemisphere gyroscope are discussed, such as measuring error on measuring electric circuit, electric capacity non-linear effect error between electrode and shell, hot drifting phenomenon, linear acceleration error as well as the asymmetrical structure and the asymmetrical damping errors. Understanding above error sources is the foundation of the microstructure manufacture and the circuit design.
出处
《传感器与微系统》
CSCD
北大核心
2007年第1期30-32,共3页
Transducer and Microsystem Technologies
基金
江苏省自然科学基金资助项目(BK2003091)
关键词
微型半球陀螺仪
量测误差
非线性效应
热漂移
结构误差
miniature hemisphere gyroscope
measuring error
non-linear effect
hot drifting
structure error
