摘要
研制成功六硼化镧单晶阴极电子枪,用于扫描电镜后,分辨本领由60埃提高到40埃,阴极寿命由几十小时延长到一千小时。
A single crystal LaB6 cathode electron gun has been sucessfuUy developed. It has been used on the KYKY 1000B Scanning electron microscope, and has yielded good results: the resolution of SEM instru-ments can be improved significantly from 60 Angstroms to-40 Angstroms, The lifemtime of cathode can be extended from tens of hours to about one thousand hours.
出处
《电子显微学报》
CAS
CSCD
1990年第1期71-75,共5页
Journal of Chinese Electron Microscopy Society
