摘要
为了研究钛膜表面阳极氧化层对吸附和解吸氢同位素特性的影响,需制备和表征钛膜表面阳极氧化层。设计了钛膜表面阳极氧化装置,确定了制备厚度不同的氧化层的阳极氧化工艺参数,其工艺简单、易操作;并对阳极氧化层进行了AES深度剖析和XPS化合价分析。其结果如下:在确定的工艺参数下,设计加工的阳极氧化装置能够制备出表面呈彩色的阳极氧化层,而且表面平整、光滑、均匀,与基体金属结合牢固;采用AES深度剖析确定了阳极氧化层的厚度,而且在其它条件相同时,获得阳极氧化层的厚度随着电压、H2SO4浓度和时间的增加而明显变厚的规律;采用XPS研究了阳极氧化层钛的主要价态为+4、+3和+2价,氧化层主要组成为TiO2、Ti2O3和TiO。
It was necessary that anodic oxide layers were prepared on the surface of titanium film and its surface property was ascertained for the sake of investigating effects of anodic oxide layers on characteristics of absorbing and desorbing hydrogen isotope. Anodic oxidation apparatus on the surface of titanium film of molybdenum substrate was designed. The technical parameters of anodic oxidation what determine the thickness of anode oxidation layers were ascertained. The AES profile and XPS valency analysis of anodic oxidae layer were measured. The results indicate that the color anodic oxide layers are prepared by using anodic oxidation apparatus designed and machined in the ascertained technical parameters of anodic oxidation, the oxidation technique is simple, and operated easily. The surface of the anode oxidation layers is flat, slick and uniform, and the anode oxidation layers link firmly with titanium films. The anodic oxide layers thicken with the increasing of voltage, concentration of H2SO4 and time respectively when other condition is uniform. Titanium valency on the surface of oxide layers is analyzed by XPS, and its result shows that titanium valency mainly is ＋4, ＋3 and ＋2 . The component is TiO2, Ti2O3 and TiO mainly in the anodic oxide layers.
出处
《表面技术》
EI
CAS
CSCD
2007年第1期51-55,共5页
Surface Technology
基金
中国工程物理研究院行业预研基金(20020536)
中国工程物理研究院核物理与化学研究所科技创新基金(805)资助
关键词
钛膜
阳极氧化
制备
表征
Titanium film
Anodic oxidation
Preparation
Surface property
