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PET基纳米ZnO溅射成膜及其紫外线通透性能 被引量:7

Sputter coated nano-ZnO film on PET substrate and its ultraviolet radiation transmittance
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摘要 在纺织材料表面附着ZnO能增加其防紫外线透过功能,利用RF磁控溅射法在PET非织造布表面沉积ZnO薄膜,并利用原子力显微镜(AFM)和能量弥散X射线法(EDX)对ZnO薄膜的表面形貌和结构进行表征和分析。结果表明:利用RF磁控溅射沉积的纳米ZnO薄膜其成膜方式是一种多层生长模式,薄膜颗粒中只含有Zn、O 2种元素;沉积的ZnO颗粒具备纳米级尺度,且颗粒分布均匀、膜层致密。利用紫外可见分光光度计测试表明,形成的ZnO薄膜对紫外线具有很好的吸收能力,对可见光的透过基本没有影响。 The textile material with the surface deposited with zinc oxide can increase its anti-ultraviolet property. In this paper, ZnO film was deposited on PET nonwovens substrates by RF magnetron sputtering. The morphology and the structure of the sputter-deposited film were characterized by atom force microscopy (AFM) and the energy-dispersive X-ray (EDX). The results showed that it formed a multi-layer film containing only two elements--Zn and O. The nano-scale ZnO in the film distributed evenly and compactly. The ultraviolet-visible photometer tests showed the ZnO film had good ultraviolet screening ability with little influence to the transmittance of visible sight.
出处 《纺织学报》 EI CAS CSCD 北大核心 2007年第2期48-51,共4页 Journal of Textile Research
基金 教育部科学技术研究重点项目(NO.106089)
关键词 纳米ZNO 溅射沉积 紫外线 PET nano-ZnO magnetron sputtering ultraviolet ray PET
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