摘要
压电陶瓷换能器两端的银电极要求较高的平面度及较好的表面质量。由于其上的银电极极薄（50～60μm），加工余量很少。一般的超精密加工过程易出现银电极加工过量的现象，因此本研究直接采用单位去除量少的超精密抛光来对超薄银电极进行超精密加工，并采用高平面度的锡盘，使银电极保留完整且平面度较高。本文通过各组工艺试验，比较研究了加工压力、抛光速度及抛光液对压电陶瓷银电极平面度、表面去除量的影响，并得到超薄银电极的最佳加工工艺。
The silver electrode of piezoelectric ceramic transducer requires high flatness and surface quality, but it is extremely thin（50-60μm）. The mechanical allowance is very little,and the silver electrode is easily worn out in traditional ultra-precise machining. Because the removal rate of polishing is small ,the new processing uses the polishing process directly. In order to improve the surface flatness of the silver electrode, the high flatness tin polisher is adopted. The main influencing factors,including the concentration of slurry,machining pressure and machining speed on the flatness ,surface quality and removing stock were tested and discussed in several groups of contrastive experiments,and the best technique is obtained.
出处
《轻工机械》
CAS
2007年第1期110-112,共3页
Light Industry Machinery
关键词
压电陶瓷换能器
银电极
平面度
表面质量
超精密抛光
piezoelectric ceramic transducer
silver electrode
flatness
surface integrity
ultra-precise machining
