摘要
离子束研磨减薄技术中,目前常用的是氩离子。而用氩离子,对于某些化合物,会发生不均匀研磨减薄,残留某种元素的小岛,而改用碘离子能克服这种缺点。
In ion beam milling technique, ordinarily, the argon ion is used as the ion source. But it usually makes some damage on the surface. This paper reports the improvement of ion milling technique with the ion of iodine as the ion source instead of argon ion. The milling results with different ion sources are demenstrated in high resolution electron microscopy images.
出处
《电子显微学报》
CAS
CSCD
1989年第3期66-68,共3页
Journal of Chinese Electron Microscopy Society
