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硬质合金沉积CNx薄膜及其摩擦性能研究

〗Frition and wear property of CNx deposition on cemented carbide
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摘要 采用射频反应磁控溅射法在硬质合金(YG8)基片上沉积了CNx和CNx/TiN复合薄膜,并对其进行了后处理。XPS分析CNx薄膜的化学结构表明其中含有N-sp3C和N-sp2C两种结构。摩擦磨损实验研究表明样品具有良好的耐磨性能,样品经后处理后摩擦系数显著降低。 CNx and CNx/TiN composite films have been deposited on cemented carbide（YG8 ）by RF reaction magnetron sputtering. Analyzing by XPS indicated two types of chemical structure N-sp^3C and N-sp^2C binding states existed in the CNx films. The wear resistance of CNx films is fine. Friction coefficient of sample decrease greatly after post-treatment.
作者 刘军 唐利强 陈志刚
机构地区 江苏大学材料科学与工程学院 江苏工业学院
出处 《化工新型材料》 CAS CSCD 北大核心 2007年第3期58-60,共3页 New Chemical Materials
关键词 CNX薄膜 硬质合金 摩擦磨损 carbon nitride, cemented carbide, friction and wear
分类号 TB383.2 [一般工业技术—材料科学与工程]
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化工新型材料
2007年 第3期

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