摘要
热膨胀系数(α)是衡量材料性能优劣的一个重要参数,但目前对薄膜试样热膨胀系数测量方法的文献报道较少.具体介绍一种采用热机械分析仪测量薄膜试样热膨胀系数的方法.在此基础上分析引起测量误差的原因,并通过参比铜箔对仪器进行了校正,获得仪器的修正参数.结果表明,通过校正消减了仪器自身热膨胀,能精确求出薄膜的热膨胀系数.
Coefficient of thermal expansion is an important character to evaluating materials, but its measuring method has not been prescribed. The measuring principles of thermal mechanic analyzer （TMA） are presented error courses are analyzed. The TMA is calibrated with a reference copper foil through which the instrument correction parameters are acquired. The results show that calibration could adjust the error generated by TMA itself and the CTE of films could be measured accurately.
出处
《南京工业大学学报（自然科学版）》
CAS
2007年第2期58-61,共4页
Journal of Nanjing Tech University(Natural Science Edition)
关键词
热膨胀系数
热机械分析
修正参数
薄膜
coefficient of thermal expansion
thermal mechanic analyzer
correction parameters
films
