摘要
提出了一种以压阻检测技术为基础,压电陶瓷为微驱动元件,具有两级位移放大且集成三维微力传感器的微夹持器。采用有限元软件对微操持器放大机构和传感器弹性体进行分析,并给出了传感器的标定方法。实验证明,该传感器具有无耦合、测量分辨率高、线性度好、标定简单的优点,满足了预计的设计要求,传感器最大量程为10 mN,X向与Y向的分辨率均为2.4μN,Z向的分辨率为4.2μN;同时也验证了所设计的微夹持器的合理性和实用性,当压电陶瓷驱动电压取200 V时,微夹持器的张合量达到最大值274μm。
A novel micro gripper integrating micro tri-axial force sensor and two-grade displacement amplifier is presented bases on piezoresistive detection and using PZT as its micro driving component. The micro tri-axial force sensor consisting of a flexible cross-structure realized by Deep Reactive Ion Etching （DRIE） is fabricated on a single-crystalline-silicon by MEMS technology. The arms of the cross-structure are connected to a silicon frame and to the central part of the cross-structure. After modeling the amplifier structure of micro gripper and the sensor, Finite Element Method （FEM） is used to analyze the displacement of the micro gripper and the deformation of the elastic cantilever. Then the calibration method of tri-axial sensor based on the microscopic vision and the cantilever beam＇s principle is proposed. The experimental results show that the major feature of the sensor are the high level of intrinsic decoupling of the signals from strain gauge, high resolutions in all three axes, high linearity, repeatability and simple calibration. In addition,they also show the micro gripper is reasonable and practical. The sensor is capable of resolving forces up to 10 mN with resolution of 2.4 μN in x axis and y axis and up to 10 mN with resolution of 4.2 μN in z axis; the maximal gripping displacement of the micro-gripper is 274 μm under a driving voltage of 200 V.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2007年第4期550-556,共7页
Optics and Precision Engineering
基金
国家863计划资助项目(No.2004AA420040)
国家863计划基金项目(No.2006AA04Z256)
长江学者和创新团队发展计划资助项目
关键词
三维微力传感器
压电陶瓷
解耦
微夹持器
有限元分析
micro tri-axial force sensor
PZT
decoupling
micro-gripper
finite element method
