摘要
X光电子分光镜(XPS)分析被用来界定和比较未接触铝表面、氧接触铝表面和氟接触铝表面的气体扩散器。未接触和氧接触样品铝表面会形成Al2O3,另一边,氟接触表面倾向生成氢氧化氟铝表层。从氢氧化氟铝表层的形成看上去,像是由原有的Al2O3、氟和水蒸气共同反应产生的。扫描电镜(SEM)的显微照相则显示三种样品表面是光学相似的。
This paper uses data from XPS analyzes the surface reaction between Al, O and F on the surtace or unused, O-exposed and F-exposed Aluminum. We found there will be a natural passivation layer on top of Al while when once the surface contact with F and vapor, Aluminum hydroxide fluoride will form. The SEM micrographs show the surface of three samples are optically similar.
出处
《电子与封装》
2007年第4期40-44,48,共6页
Electronics & Packaging
