摘要
利用Ｘ射线衍射、光电子能谱、电镜、Ｒａｍａｎ光谱等现代测试手段分析了Ｎ＋注入α－Ａｌ２Ｏ３前后材料表面的相组成、原子组成及显微结构，对离子注入改性Ａｌ２Ｏ３表面的摩擦、磨损行为进行了研究。结果表明１×１０１７Ｎ＋／ｃｍ２离子注入Ａｌ２Ｏ３后，Ｃ在Ａｌ２Ｏ３表面上的污染所形成较牢固的膜和注入增加的表面硬度，使Ａｌ２Ｏ３的润滑性能有明显的改善。同时，Ｎ＋注入Ａｌ２Ｏ３后产生的表面压应力使陶瓷表面裂纹变短、变细、变圆等，提高了陶瓷的磨损性能。
The surface structure and tribological properties of α-Al 2O 3 implanted with N + ions have been investigated by XPS, X-ray diffraction, Raman shift, SEM, DFPM and scratch testers. It is shown that lubrication of the implanted Al 2O 3 is greatly improved because a strong contaminated carbon film is formed on the Al 2O 3 surface and the surface hardness is increased in implanting process. The surface compressive stress due to the implantation can also make the surface fractures short and round, thus enhancing wear resistance of Al 2O 3.
出处
《核技术》
CAS
CSCD
北大核心
1997年第4期204-209,共6页
Nuclear Techniques
关键词
离子注入
摩擦
氮离子
陶瓷材料
N + ion implantation, Al 2O 3, Tribological properties
