摘要
针对大尺寸试件的圆柱度误差的超精测量时仪器的测量基准的误差分离问题，提出了一种可分离出基准间的平行度误差以及直行基准的直线度误差的方法，即反向法误差分离技术。利用该方法建立的两截面及多截面误差分离模型已用于重要试件圆柱度误差的超精测量中，误差分离结果的不确定度为０．２２μｍ。
In the light of error separating problem of measuring datum of instrument during the cyindrical error measurement of large dimension and super precision specimen, this paper put forward a kind of error separating method which can separate the parallelism error between datum and straightness error of slideway, i.e reversion method error separation technique. Therefore, that problem is solved perfectly. The two section and muiti-section model which is established by the new technique have been used to the super precision measurement of cylindricity error for some important specimen. The uncertainty of error separating result is less than 0.22 μ m. This technique also can be applied to the super perecision machine tools.
出处
《东北林业大学学报》
CAS
CSCD
北大核心
1997年第2期45-48,共4页
Journal of Northeast Forestry University
关键词
圆柱度仪
测量基准误差
反向法
误差分离
Cylindricity instrument
Measuring datum error
Reversion method
Error separation technique
