摘要
本文介绍了1种在膜中定量测量光生酸剂产酸量的标准工作曲线的建立方法。选用罗丹明B作为指示剂,通过其紫外吸光度的改变来反映酸度的变化。用紫外分光光度计测量盐酸、三氟甲磺酸在不同浓度时罗丹明B的特征吸收的变化,选取酸浓度与罗丹明的特征吸收的变化量呈线性关系的线段部分作为标准曲线。光生酸剂曝光后罗丹明B的特征吸收变化对应到标准曲线中,通过计算就可以得出光生酸剂曝光产生的酸量。
This paper reports a novel method to set up standard curves for measuring acid-generation of PAG in polymer films that are widely used in microlithography. The method employs rhodamine B as acid sensor due to its character that color will change in acidic condition. We examine the property of rhodamine B in hydrochloric and trifluorin methanesulfonic acid, and set up the calibration curves in thin polymer （phenolic resin）, which indicate the relations of acid concentration and rhodamine B＇s relative absorption. In this case, the difference in absorption could reflect the different amounts of acid generated. According to these calibration curves and kinetics curves, we can calculate the efficiency of PAG. generated acid.
出处
《信息记录材料》
2007年第3期25-28,共4页
Information Recording Materials
关键词
光生酸剂
产酸量
分光光度法
photoacid generator
quantities of acid generation
photometry
