摘要
采用真空反应蒸发技术，在聚酯薄膜基片上制备出高质量的ＩＴＯ透明导电薄膜。
ITO films with high optical transmission and conduction were prepared by evaporating In Sn alloys onto the polyester substrates in oxygen.Structure and optoelectrical properties of the deposited films were investigated.
出处
《山东大学学报（自然科学版）》
CSCD
1997年第1期49-53,共5页
Journal of Shandong University(Natural Science Edition)
基金
山东省自然科学基金
山东大学青年基金
