摘要
氮化硅薄膜是一种多功能材料,在许多领域有着广泛的应用。本文系统综述氮化硅薄膜的性质、结构、应用及各种制备方法,并对今后的研究作了展望。
As a kind of mufti - functional materials, silicon nitride thin film is widely used in many fields. In the paper, the properties, structure, applications and preparation methods of silicon nitrides films were overviewed. The research is also be looked into the diatance.
出处
《现代技术陶瓷》
CAS
2007年第2期12-18,共7页
Advanced Ceramics
关键词
氮化硅薄膜
制备方法
化学气相沉积
silicon nitride thin film
preparation method
chemical vapour deposition
