摘要
随着IC制造技术的迅速发展,硅膜片式压力传感器及其集成化压力传感器受到青睐,对其开发研制相当盛行。本文以应用压阻效应原理的硅膜片式压力传感器为中心阐述半导体压力传感器的最近研制现状与开发动向。
With the development of IC manufacturing technique, the Si-film pressure sensor and the integrated pressure sensor get more and more attentions . The research about them are popular . The lastest research status and development trend of semiconductor pressure sensor are presented in this paper with the focus on the Si-film pressure with piezoresistance effect theory
出处
《传感器世界》
2007年第7期10-13,共4页
Sensor World
