摘要
Accurate solutions of acoustic waves in piezoelectric substrate and metal film as layered structure were obtained. Phase velocity, electromechanical coupling coefficient and static capacitance were calculated based upon the solutions. Chen and Haus＇ theory was used to analyze surface acoustic waves in shorten gratings with single finger every period and a reflection coefficient expression of one strip was presented. Parameters of aluminum on X-112°Y LiTaO3 and gold on ST-quartz were calculated. The results agreed well with those from Ken-ya Hashimoto＇s theory. The reflection coefficient of gold on ST-quartz was measured to verify the theoretical result.
Accurate solutions of acoustic waves in piezoelectric substrate and metal film as layered structure were obtained. Phase velocity, electromechanical coupling coefficient and static capacitance were calculated based upon the solutions. Chen and Haus＇ theory was used to analyze surface acoustic waves in shorten gratings with single finger every period and a reflection coefficient expression of one strip was presented. Parameters of aluminum on X-112°Y LiTaO3 and gold on ST-quartz were calculated. The results agreed well with those from Ken-ya Hashimoto＇s theory. The reflection coefficient of gold on ST-quartz was measured to verify the theoretical result.
基金
This work was supported by the National Natural Science Foundation of China (No. 10374100).
