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超精密研磨技术的现状及发展趋势 被引量:5

Introduction to Ultra-precision Lapping Technology and Development
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摘要 概述了最近超精密研磨技术的研究动态,介绍了研磨技术的原理、应用和优势,同时介绍了课题组研制的基于修正环在线修整抛光盘技术及专家数据库系统控制的N anopo li-100智能型纳米级抛光机,结合该领域的最新研究成果,提出了其向高精度、高效率发展的方向。  The article introduces the current research states of ultra-precision lapping technology.The principle,application and predominance of lapping technology as well as the nano intelligent polishing machine based on in-line dressing technology by correction ring and intelligent controlling.Combining with up to date reach achievements,the authors put forward the high accuracy and efficiency development direction.
出处 《轻工机械》 CAS 2007年第4期9-12,共4页 Light Industry Machinery
基金 国家自然科学基金重点项目(50535040)
关键词 研磨技术 超精密 Nanopoli-100智能型研磨抛光机 发展动向 lapping technology ultra-precision development
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