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ITO表面处理对有机电致发光器件性能的影响 被引量:3

Influence of ITO Surface Treatment on Performance of Organic Light-Emitting Devices
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摘要 用Al2O3抛光液处理ITO表面制备了有机电致发光器件.将ITO玻璃片分别放入Al2O3水选分级后的不同粒度的抛光液中,进行不同时间的超声处理,发现随着Al2O3抛光液粒度不同、超声时间的不同、ITO的表面质量不同,器件的性能都有不同程度的变化.经过优化发现,当Al2O3抛光液水选分级后的粒度是0.6μm,超声时间为10min,采用导电层的厚度是50±10nm,方块电阻是40Ω/□的ITO时,器件的亮度在同一电压下提高了三倍多,器件达到100cd/m2的亮度所需驱动电压也由9V降至6V,器件的最大亮度在15V时达到了25880cd/m2,最大效率也由2.5cd/A提高至3.82cd/A.通过原子力显微镜对ITO表面形貌进行分析,可以看到,经过Al2O3抛光液处理的ITO玻璃片表面粗糙度降低了,粗糙度的降低有助于阳极和有机物的结合,有利于空穴的注入,从而使得器件性能得到改善. ITO anode surfaces are polished with Al2O3. Machine polishing is replaced with an ultrasonic process,which is easier to control to obtain a better ITO anode surface. ITO-coated glass substrates (ITO thickness is 50 ± 10nm,sheet resistance is 40Ω/□) are put into different water-graded Al2O3 polishing solutions with different Al2O3 granularities. Then devices are fabricated with a traditional double-layer structure. The performance of the organic light-emitting diodes (OLEDs) based on the indium tin oxide (ITO) anodes processed ultrasonically in Al2O3 polishing solution is improved. By optimizing the Al2O3 granularity to 0.6μm and the ultrasonic processing time to 10min,the drive voltage falls from 9 to 6V at 100cd/m^2 compared with the control device,which underwent no treatment. The luminance of the device is over three times that of the control device,reaching 25880cd/m^2 at 15V. The luminous efficiency is 3. 82cd/A, which is the best of all the devices. As a result, with an Al2O3 granularity of 0. 6μm and ultrasonic processing time of 10min, the electroluminescence performance of the ITO-treated device is improved. The solution-treated sample shows a much smoother surface than the non-treated one, which enhances the hole injection, leading to improved device performance.
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第8期1312-1315,共4页 半导体学报(英文版)
基金 国家自然科学基金(批准号:60207003 60376028) 国家重点基础研究发展规划(批准号:2003CB314703) 吉林省科技发展计划(批准号:20050523) 吉林省教育厅科研计划(批准号:吉教科合字[2003]第25号 第54号) 四平科技局计划(批准号:四科合字第20030017号)资助项目~~
关键词 有机电致发光器件 ITO 抛光 organic light-emitting device indium tin oxide anode polishing
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参考文献11

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