摘要
微细加工技术是现代加工技术手段的新发展,是二十一世纪关键技术之一。本文介绍了微机械与微细加工技术的发展过程、技术特点以及相关理论基础,并具体阐述了微细加工技术的应用、发展的意义、存在的问题及发展要求。
Micro mamffacturing technology is the new development of method for manufacture technology today, and also is one of the key technology in twenty - one century. The developing process , technical features and the base of correlation theory of the Micro machine and Micro Manufacturing Technology are introduced on this paper, and the application , development significance, questions, the requesting for development are also expounded in detail.
出处
《现代机械》
2007年第4期76-78,共3页
Modern Machinery
关键词
微细加工
微机械
微机电
微电子
micro manufacturing
micro machine
micro electro mechanic
micro electron
