摘要
使用溶胶-凝胶法在P型Si（100）衬底上成功地制备了具有c轴择优取向性和高可见光透射率的多晶ZnO薄膜。通过XRD、SEM以及PL光谱等分析,表明：所制备的是结晶良好的ZnO薄膜,表面均匀致密,薄膜晶粒尺寸大约在15～60nm,颗粒平均直径大约为38nm。由透射谱可知,制备的ZnO薄膜在可见光区域内薄膜的平均透射率在85%以上;由光致发光谱可知,室温下可观察到显著的紫外光发射,说明具有较好的光学性质。
The ZnO thin films were prepared on Si（100） substrates by sol-gel technology,which were characterized by X-ray diffraction,SEM and PL spectrum.The results indicated that the thin films were c-orientation,highly visible transmittance and homogeneous and dense surface.The characteristics of this technique were simple,nontoxic,practical.The XRD showed that the film by the above method was ZnO crystal.The crystalline dimension was 15～60 nm and the average was 38nm.The transmittance of ZnO thin films 〉85% in 300～800nm visible region.The optical properties of the films were characterized with photoluminescence（PL）.Strong UV emission located at 381 nm was observed when excited with 325nm light.
出处
《化工新型材料》
CAS
CSCD
北大核心
2007年第8期50-51,共2页
New Chemical Materials
