摘要
在因子分析模型的基础上,使用主成分分析方法计算载荷矩阵,选取全部公共因子,并考虑对应因子的贡献率,建立基于权重系数的多变量工序能力指数计算模型。该模型能克服多变量个数的限制问题。实例分析表明,计算结果能有效地反映工艺水平的变化。
Based on the model of factor analysis, a model of multivariate process capability index （PCI） based on weighting coefficient is presented. In this model, principal component analysis was used to compute load matrix and all public factors and contribution ratio were taken into consideration. An example of multivariate PCI calculation shows that the method presented is effective.
出处
《微电子学》
CAS
CSCD
北大核心
2007年第4期504-506,510,共4页
Microelectronics
关键词
工序能力指数
权重系数
多变量
质量特性
Process capability index
Weighting coefficient
Multivariate
Quality characteristics
