摘要
当微定位台的结构是多环、多自由度时,由于空间的限制,通常其运动方程是耦合的,需对它进行综合分析和解耦。本文用螺旋理论对多自由度柔性铰链的运动和动力学解耦问题进行研究和探讨,并以一实例说明了其解耦设计方法。这对准确实现指定动作、正确设定驱动点的位置、合理确定机构的结构形式,最大限度地减小各自由度间的动态干涉有很重要的意义。
Due to space limit, the motion equations are often coupled when the micro positioning stage has multiple links and freedoms. Thus, synthesis and decouple are necessary. In this paper, the Screw Theory was applied to study the problem and an example was given to explain this decoupling design method. Then this will be a great help to obtain fine motion accuracy, correct driving point position and the reasonable structure to reduce dynamic interference between freedoms.
出处
《光学精密工程》
EI
CAS
CSCD
1997年第4期35-40,共6页
Optics and Precision Engineering