摘要
金刚石膜突破了人造金刚石在尺寸上的限制,使金刚石的优异性能得到了充分的发挥,从而大幅度拓展了金刚石的应用领域。文章叙述了金刚石膜及其发展历程,综述了其日益繁多的制造技术以及在现代技术中越来越广阔的应用,对我国金刚石膜技术应用中存在的问题及其发展前景提出了一些看法。
Superior performance of diamond is fully brought out by diamond film because it is not limited in size as synthetic diamond usually does, therefore it widened the application field of diamond in great extent. Diamond film and its developing history are stated and the gradually diversified manufacturing technology of the diamond film and increasingly widened use in modern technology is summarized in the paper. Some comments on the problems and developing trend concerned about the diamond film technology in China are made as well.
出处
《超硬材料工程》
CAS
2007年第4期33-37,共5页
Superhard Material Engineering
关键词
金刚石膜技术
类金刚石膜
综述
制造方法
发展前景
diamond film technology
diamond-like film
summary
growing method
development trend
