摘要
IC装备制造业是国家发展战略的重要行业。在该行业中,70%的工作需要在对洁净度要求苛刻的真空环境下进行。而在用于IC装备制造业的干式罗茨泵中,一对罗茨转子的生产成本占总成本的40%左右。罗茨转子是罗茨真空泵的最关键的核心部件。本文基于啮合原理,通过计算机动画编程和理论计算,提出一种适合直排大气罗茨干泵的转子型线,并对型线和转子结构进行改进,使加工更为简单。分析了容积利用系数和转子间隙分布,并得出结论:(1)改进型线的容积利用系数的改变量在5%以内,对抽气性能影响不大;(2)转子啮合时的间隙分布绝对误差在0.025mm以内,并不影响泵的热力学及抽气性能,验证了结构改进的合理性。文末还介绍了一个改进结构罗茨转子加工的实例。
The profile of the rotors - a critical part of Roots dry vacuum pump available to discharge directly into atmosphere - has been theoretically derived with computer animation programming on the basis of its gearing geometry and its structure has also been improved accordingly to simplify its fabrication.The calculated results show that changes in volumetric utilization coefficient within 5%little affect the pumping performace of the improved Roots pump, and that if the absolute error of the rotors＇ gear backlash distribution is less than 0.025mm, the thermodynamic and pumping characteristics basically remain unchanged. Moreover, the prototypical rotors with the improved profile and structure were built to demonstrate its manufactuing technology on industrial scale.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2007年第5期446-449,共4页
Chinese Journal of Vacuum Science and Technology
基金
国家十五863项目资助(No.2005AA1Z2030)
关键词
罗茨真空泵
型线设计
啮合原理
直排大气
容积利用系数
啮合间隙分布
Roots vacuum pump, Profile design, Gearing geometry, Discharge directly into atmosphere, Volumetric utilization coefficients, Gearing backlash distribution
