摘要
传统焓探针测量系统采用质量流量计测量样品气体的流量,这种方法的缺点是强烈依赖于等离子体工作气体的组分以及在测量时必须等待在焓探头内样品气体流动达到稳定状态,因此测量时间较长.本文介绍的快速焓探针测量系统中,用一个已知体积的储气罐获得被抽样品气体的摩尔量,从而克服了传统焓探针的缺点,实现了在几秒之内完成对一点的焓值测量.本文从四个方面的实验验证了快速焓探针测量结果的准确性.
Traditional enthalpy probe system use the Mass Flux Controller （MFC） to measure the flux rate of sample gas. However, this method much depend on the composition of plasma working gas under the condition of steady state of sample gas inside the probe, so it takes much more time to measure the enthalpy of a point. In order to overcome the disadvantage of traditional probe, the rapid enthalpy probe system we devised measure the molar weight of sample gas by using a known volume gas container instead of MFC, making it possible to measure the enthalpy of one point in several seconds. The accuracy of result acquired by our rapid enthalpy probe system is verified through our four different experiments.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2007年第10期5952-5957,共6页
Acta Physica Sinica
