摘要
采用多源磁控溅射物理气相沉积法在单晶硅表面制备梯度变化的非晶碳涂层(类金刚石薄膜),通过调整工艺参数获得厚度在1～2μm的非晶碳涂层;采用球-盘式摩擦磨损试验机探讨了非晶碳涂层在干燥空气、水润滑和油润滑环境下的摩擦磨损行为。结果表明:非晶碳涂层的摩擦因数基本保持在0.1左右,摩擦环境的变化对涂层的磨损率影响较大;非晶碳涂层在水润滑环境中的磨损率在10-7mm3/Nm数量级;在干燥空气摩擦环境中具有稳定的耐磨损性能,磨损率在10-9mm3/Nm数量级;特别在油润滑的环境下,非晶碳涂层的耐磨损性能更加优异。
Amorphous carbon films （diamond-like carbon） of gradient structure were deposited on Si wafer by a multiple source magnetron sputtering PVD deposition system. The thickness of films was controlled in 1-2 μm by controlling the processing parameters. The friction and wear properties of the films were measured using a ball-on -disk tribo-tester in dry-air, water and oil environment respectively. It was showed that the friction coefficient is nearly 0.1, the environment has some influences on the wear rate. In oil environment the wear rate of films is 10^-7mm^3/N.m; the films have stable resistance to wear in dry air environment, approximately in the level of 10^-9 mm^3/N.m. The films with excellent wear resistance in oil environment especially were obtained.
出处
《中国表面工程》
EI
CAS
CSCD
2007年第5期32-36,共5页
China Surface Engineering
基金
国家自然科学基金资助项目(50575224)
关键词
非晶碳涂层
梯度变化涂层
摩擦磨损性能
amorphous carbon films
gradient structure films
friction and wear behavior
