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差动电磁作动器的超大型光学仪器隔振基础的主动控制机理 被引量:7

Control mechanism based on differential electromagnet actuator for a room-sized optical instrument vibration isolation foundation
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摘要 提出了一种基于差动电磁作动器的超大型光学仪器隔振基础的主动控制机理。该控制机理采用差动布置方案,使电磁作动器变为输出力和控制电流呈线性关系的线性作动器,再利用小阻尼条件下,绝对速度反馈与Skyhook控制方法性能接近且易于工程实现的特点,采用了绝对速度反馈的控制方法,可在不改变中/高频隔振性能的前提下大幅提高谐振区隔振性能。实验结果表明:利用所提出的控制机理,在时域上,z、xθ和θy三个自由度的速度(角速度)均方根值分别由10.06μm/s、4.16×10-6rad/s和4.65×10-6rad/s降至3.38μm/s、1.76×10-6rad/s和1.49×10-6rad/s;在频域上,三个自由度谐振区隔振性能均有约10 dB的提高。 In order to improve further vibration isolation performance, a new active vibration control mechanism based on differential electromagnet actuator is presented for room-sized vibration isolation foundation. By using the differential scheme, the output force of the actuator is linear with control current. Because absolute velocity feedback method and Skyhook method have the similar performance in the weak damping conditions and the former method is more easier to realize, the absolute velocity feedback method is selected as the control strategy. The control strategy can efficiently improve the performance in resonance area without losing the performance of high frequency area. Experiment results show that by using the proposed mechanism, the mean square roots of velocity or angle velocity at the three degree-of-freedom z, θx and θy fall to 3.38μm/s,1.76× 10^-6 rad/s and 1.49× 10^-6 rad/s from 10. 06 μm/s,4. 16× 10^-6 rad/s and 4.65× 10^-6 rad/s in time domain, and the vibration isolation performance in resonance area improves 10 dB in frequency domain.
出处 《光学精密工程》 EI CAS CSCD 北大核心 2007年第10期1602-1608,共7页 Optics and Precision Engineering
基金 国家自然科学基金资助项目(No.50675052)
关键词 超大型光学仪器隔振基础 主动控制 差动电磁作动器 room-sized optical instrument vibration isolation foundation active vibration control differential electromagnet actuator
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