期刊文献+

含有序孔洞的多孔氧化铝薄膜的弹性模量测量

Elastic Modulus Investigation of Nanoporous Alumina Membrane
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摘要 高纯铝箔在特定的溶液下经过电化学阳极氧化腐蚀,可在其表面生成一层多孔的非晶氧化铝层,孔大致呈六方密排,孔径分布均匀。此类薄膜具有规则的纳米级孔径,大的比表面积,可用在微纳滤方面和纳米材料组装方面。然而,对于此类薄膜力学性能的研究较少,在一定程度上限制其功能的开发和应用。为了获得此类多孔膜的弹性常数,本文用鼓膜法结合散斑干涉实验方法、单轴拉伸结合双光束干涉法和多普勒测振仪三种方法测量氧化铝多孔膜的弹性模量,得到的宏观弹性模量基本相同,并对三种方法的优缺点进行了比较,分析了多孔氧化铝膜与块状氧化铝材料或致密氧化铝膜力学性能的差异。 Nanoporous alumina membranes containing parallel regular pores of uniform size and normal to substrate surface were fabricated by anodically oxidizing high purity aluminum foils in acid solutions. Their fine structure and physical-chemical stability make them very useful as separator in filtering and as template in nanomaterial fabration. However, the significant macro-mechanical properties of this membrane are reported scarcely. In this work, three methods including bulge testing, uniaxial tension testing and resonant method are used to investigate the elastic modulus of this nanoporous membrane. The similarity and discrepancy of the results from these different methods are compared and analyzed. The results indicate unusual mechanical behavior of these nanoporous anodic alumina membranes compared with bulk alumina materials or dense alumina films, which provides improved understanding of the relationship of the micro-meso structure and the mechanical properties.
出处 《实验力学》 CSCD 北大核心 2007年第3期440-446,共7页 Journal of Experimental Mechanics
基金 国家自然基金项目(10302026)资助
关键词 多孔氧化铝薄膜 鼓膜法 单轴拉伸 多普勒测振 nanoporous alumina membrane bulge test uniaxial tension resonant method
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参考文献17

  • 1Patermarakis G, Moussoutzanis K. Mathematical models for the Anodization Conditions and Structural Features of Porous Anodic Al2 O3 Films on Aluminum [J]. J. Electrochem. Soc. , 1995,142:737-743.
  • 2Shawaqfeh A T. Fabrication and characterization of novel anodic alumina membranes[D]. Clarkson University, Potsdam, NY, 1997.
  • 3Shawaqfeh A, Baltus R. Growth Kinetics and Morphology of Porous Anodic Alumina Films Formed Using Phosphoric Acid [J]. J. Electrochem. Soc. , 1998,145:2699-2673.
  • 4Young L. Anodic Oxide Films[ M]. Academic Press, London, 1961.
  • 5Keller F, Hunter M S, Robinson D L. Structural Features of Oxide Coatings on Aluminum [J]. J. Electrochem. Soc, 1953,100: 411.
  • 6Wood G C, Diggle J W(Ed. ). Oxides and Oxide Films(vol. 1)[ M]. Marcel Dekker, New York,1973:167.
  • 7Thompson G E, Wood G C, Scully J C(Ed. ). Treatise on Materials Science and Technology(vol. 23)[M]. Academic Press, New York, 1983 : 205.
  • 8Tikhov S F, Chernykh G V, et al. Honeycomb Catalysts for Clean-up of Diesel Exhausts Based upon the Anodicspark Oxidized' Aluminum Foil [J]. Catalysis Today, 1999,53 : 639 - 646.
  • 9Heintz J M, Letullier P, et al. Dielectric Properties of Alumina Lamellar Ceramics[J]. Materials Science and Engineering B, 1998,52 : 84 -88.
  • 10Khan H R, Loebich O, Rauscher G. Crystallographic and Magnetic Investigations of the Cobalt Columns Electrodeposited in the Pores of Anodic Alumina[J]. Thin Solid Films,1996,275:207-209.

二级参考文献44

  • 1[1]Hoffman R W. Physics of thin films [M]. New York Academic, 1966,3:211~273.
  • 2[2]Neugebauer C A. Tensile properties of thin evaporated gold film [J]. J. Appl. Phys., 1960, 31:1096~1101.
  • 3[3]Mencik J, Quandt E, Munz D. Elastic modulus of TbDyFe films-a comparison of nanoindentation and bending measurements [J]. Thin Solid Films, 1996, 287:208~213.
  • 4[4]Beams J W. In: Neugebauer C A, Newkirk J B, Vermilyea K A eds., Structure and Properties of Thin Films [M]. New York: Wiley & Sons, 1959.183~192.
  • 5[5]Jaccodine R J, Schlegel W A. Measurement of strains at Si-SiO2 interface [J]. J. Appl. Phys., 1966,37:2429~2434.
  • 6[6]Goosen J F L, Drieenhuizen B P, French P J, Wolffenbuttel R F. Stressmeasure ment structures for micromachined sensors [C]. In: Yokoharma ed., Proc. 7th Int. Conf. on Solids-state Sensors and Actuators. Yokohama, Japan, IEEE, 1993. 783~786.
  • 7[7]Brown S B, van Arsdell W, Muhlstein C L. Materials reliability in MEMS devices [C]. In: International Conference on Solid State Sensors and Actuators, Vol. 1. Chicago:IEEE, 1997,591~593.
  • 8[8]Bormley E L, Randall J N, Flansers D C, Mountain R W. A technique for the determination of stress in thin films [J]. J.Vac. Sci. Technol. B., 1983, 1:1364~1366.
  • 9Meinlschmidt P, Hinsch K D, Sirohi R S. Selected Papers on Electronic Speckle Pattern Interferometry:Principles and Practice. SPIE, Milestone Series MS132/HC [M]. Washington, DC: SPIE Optical Engineering Press, 1996.
  • 10Li X, Deng B, Shi H. Displacement Measurements in Micro-region with Generalized Digital Speckle Correlation Method[A]. Proceedings of the Third International Conference on Experimental Mechanics [C].Washington, DC: SPIE Optical Engineering Press,2001. 366

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